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University of Dayton, 300 College Park, Dayton OH 45469
Please check this page regularly for updates on 2008-2009 class schedules...
Auger Electron Spectroscopy (AES), 2-day
X-ray Photoelectron Spectroscopy (XPS/ESCA) 2-day
Data Processing in AES and XPS/ESCA 1-day
This five-day set of short courses on the two major electron spectroscopy techniques, Auger Electron Spectroscopy (AES) and X-ray Photoelectron Spectroscopy (XPS/ESCA) is designed for scientists, engineers, technicians, and students, who would like a detailed understanding of the uses of AES, XPS/ESCA, and Data Processing for surface analysis and depth profiling. The courses can be taken as a 5-day package or individually.
Description
Auger Electron Spectroscopy (AES) and X-ray Photoelectron Spectroscopy (XPS/ESCA) are utilized extensively in quality control, failure analysis, and both basic and applied research. The unique capabilities of these techniques for providing particular types of information will be highlighted. The courses will start with the basic physical concepts of the technique, and go on to describe their capabilities and their applications, including small area analysis and imaging. You will also learn about trace element detection, instrumentation, qualitative analysis, quantitative analysis, chemical state determination, and depth profiling. Many examples will be used to illustrate the applications of each technique for solving surface related problems. The topics covered in these courses will form a framework for participants to properly select instrumentation and to use these state-of-the-art surface analysis techniques for various applications.
Course Materials
A comprehensive set of notes will be provided for each course participant. You may also order a copy of the 900 page book “Surface Analysis by Auger and X-ray Photoelectron Spectroscopy”, edited by D. Briggs and J.T. Grant, 2003 (see Registration details).
Auger Electron Spectroscopy (2 days)
AES is used to determine the atoms present at a surface, their concentrations, their chemistry, and their lateral and depth distributions.
DAY 1:
- Introduction -
- terminology,
- surfaces,
- types of surfaces, 0.5 hour
- The principles of AES -
- production of Auger electrons,
- peak labeling,
- ionization cross-sections,
- handbooks,
- books,
- backscattering,
- surface sensitivity,
- information depth,
- sample handling. 2 hours.
- Qualitative Analysis -
- direct and derivative spectra,
- identification of elements,
- energy resolution,
- peak widths,
- chemical effects,
- plasmons,
- cross transitions,
- ion-excited Auger transitions. 2 hours.
- Quantitative Analysis -
- Auger intensities,
- sensitivity factors,
- detection limit,
- lineshapes,
- analyzer transmission,
- electron multiplier effects,
- matrix factors,
- average matrix sensitivity factors,
- diffraction,
- angle of incidence and emission
- standard spectra,
- signal-to-noise. 3 hours.
- Artifacts -
- ionization loss peaks,
- electron beam damage. 0.5 hours
DAY 2:
- Instrumentation -
- cylindrical mirror analyzer (CMA),
- field emission electron source,
- hemispherical type analyzer (HSA),
- modes of operations,
- electron detection,
- pulse counting,
- other electron sources,
- vacuum system,
- samples,
- other types of analyzers,
- scattering in analyzers,
- energy scale calibration. 3 hours
- Imaging -
- scanning electron microscopy,
- acceptance area,
- locating regions of interest,
- corrections for topography and backscattering,
- beam energy,
- spatial resolution,
- comparison of analyzers,
- electron energy loss (EELS) imaging,
- ratioed scatter diagrams,
- line scans. 2 hours.
- Insulating samples -
- charge control methods,
- effects on images and spectra,
- use of low energy ion beam. 1 hour.
- Data Acquisition, Processing and Depth Profiling -
- spectrum subtraction,
- sputtering,
- crater edge profiling,
- angle resolved AES,
- factor analysis,
- linear least squares fitting,
- sample rotation,
- mechanical methods. 2 hours.
- Instrument Selection and Summary -
- factors to consider,
- general summary. 0.2 hours.
X-Ray Photoelectron Spectroscopy (XPS/ESCA) (2 days)
DAY 1:
- Introduction -
- terminology,
- surfaces,
- types of surfaces. 0.5 hours.
- The Principles of XPS -
- production of photoelectrons,
- peak labeling,
- electronic figuration of atoms,
- atoms,
- molecules,
- solids,
- energy,
- spectra,
- Auger process,
- valence spectra,
- handbooks,
- books,
- surface sensitivity,
- information depth,
- sample handling,
- spin-orbit splitting,
- chemical shift,
- plasmons,
- multiplet splitting,
- shake-up. 3 hours.
- Instrumentation -
- dual anode,
- Bremsstrahlung,
- monochromatic source,
- electron energy analyzers,
- spectrum acquisition,
- energy resolution,
- scattering in analyzers,
- electron detectors,
- pulse counting,
- position sensitive detectors,
- small area analysis,
- area location,
- imaging XPS,
- methods,
- equipment and examples,
- vacuum system,
- samples,
- energy scale calibration. 3.5 hours.
DAY 2:
- Qualitative Analysis -
- identification of elements,
- changing x-ray sources,
- charging,
- interpretation of chemical shift,
- relaxation effects,
- Auger parameter,
- peak widths,
- lineshapes. 2 hours.
- Quantitative Analysis -
- sensitivity factors,
- ionization cross section,
- asymmetry parameter,
- analyzer transmission,
- reference spectra,
- intensities,
- background subtraction,
- detection limit,
- effect of thin overlayers. 2 hours.
- Data Acquisition and Processing -
- processing data,
- Tougaard background subtraction,
- satellite subtraction,
- peak area,
- lineshapes,
- curve fitting,
- deconvolution. 1 hour.
- Artifacts -
- X-ray damage,
- charging,
- methods for charge control,
- ghost peaks. 5 hours.
- Depth Profiling -
- non-destructive and destructive methods,
- angle resolved XPS,
- diffraction ,
- elastic scattering,
- thickogram,
- inelastic loss method,
- sputtering,
- depth calibration. 2 hours.
- Applications -
- some further examples of applications of XPS. .5 hours.
- Instrument Selection and Summary -
- factors to consider,
- general summary. 0.2 hours.
Data Processing in AES and XPS/ESCA (1 day)
XPS and AES are used to determine the atoms present at a surface and their concentrations, chemistries, and lateral and depth distributions. This course will include the operation of several software packages to show attendees how to process and evaluate XPS and AES spectra in real time. Several of these examples will be taken from the AES and XPS/ESCA courses.
- Spectra - the many features present in spectra will be described
- Background subtraction methods will be described and compared
- Shapes of peaks will be described and approaches for curve fitting will be illustrated
- Approaches for quantitative analysis will be demonstrated and errors illustrated
- Data processing methods to improve images will be demonstrated
- Data processing methods for near-surface, non-destructive depth profiling will be illustrated
- Data processing methods to remove peak overlap problems, separate different chemical states, and improve signal-to-noise in sputter depth profiles will be demonstrated
Course Faculty
John T. Grant has been an instructor in surface analysis techniques for over 20 years, and is a distinguished research scientist with the Research Institute at the University of Dayton. He received his PhD in physics from the University of New South Wales. Dr. Grant has 40 years of experience in the field of surface science and has published over 100 refereed papers in the scientific literature. His areas of expertise include all forms of surface analysis, particularly electron spectroscopies. He is co-founder of the Symposium on Applied Surface Analysis, past chair of the American Society for Testing and Materials Subcommittee on Auger Electron Spectroscopy, past chair of the Applied Surface Science Division of the American Vacuum Society, and is North American Editor of the international journal Surface and Interface Analysis.
General Information
The 5-day registration fee of $2495 includes instruction and a set of notes, parking on campus, lunch and refreshments. See below for individual course registration fees, and the book option. Payment should accompany your registration. VISA, MasterCard, and Discover are accepted, or we can invoice your company. Full-time UD/UDRI faculty and staff are eligible for tuition remission for continuing education and should check with Human Resources. UD alumni are eligible for a 10% discount.
Confirmation of your registration, including course location and parking information will be sent to you.
Driving directions to the University of Dayton are available at http://www.udayton.edu/Visiting_UD/
There is also a link to a University map from this page.
Accommodation
Special University of Dayton hotel rates are available at the Dayton Marriott, 1414 S Patterson Blvd, Dayton, 937-223-1000, and the Courtyard Marriott – University of Dayton, 2006 Edwin C. Moses Blvd, Dayton, 937-220-9060. There are many other hotels in the Dayton area covering a wide price range. The University of Dayton is 15 miles from Dayton International Airport.
Certificates and Continuing Education Units
Certificates will be given to all students who complete the courses. Continuing Education Units are also provided to those who supply their social security numbers to the University.
REGISTRATION FORM - click here for a printable registration form.
A Comprehensive Set of Short Courses on AES and XPS/ESCA
Send to: Continuing Education
University of Dayton
300 College Park
Dayton OH 45469-1350
OR Fax: (937) 229-3500
NAME: _____________________________________________
ORGANIZATION: _____________________________________________
ADDRESS: _____________________________________________
CITY _____________________ STATE _____ ZIP ________
PHONE _____________________ FAX _____________________
EMAIL ADDRESS _____________________________________________
Please indicate any special needs you may have and we will contact you.
Registration Fees:(*)
____ 5-day Comprehensive Course on AES and XPS/ESCA: $2495.00
____ 5-day Comprehensive Course on AES and XPS/ESCA and 900 page book: $2795.00
____ 2-day Course on AES: $1095.00
____ 2-day Course on XPS/ESCA: $1095.00
____ 1-day Course on Data Processing in AES and XPS/ESCA: $695.00
Method of Payment:
____ Check or Money Order payable to the University of Dayton
____ Purchase Order #: _________________________________
(Please enclose a copy of the Purchase Order with this registration form.
We will send an invoice to the contact person listed.)
____ Invoice to: ___________________________________________
___________________________________________
____ Discount, UD Alumni
____ UD/UDRI Tuition Remission Form
____ Visa
____ MasterCard
____ Discover
Card Account Number _____________________________________________
Expiration Date _____________________________________________
Signature of Authorized Cardholder _____________________________________________
TOTAL REMITTANCE $__________________________________________
Cancellation Policy:
We will refund in full, except for a $25.00 administrative fee. Substitution of participants is acceptable at any time. Requests for refunds must be made in writing.
For Additional Information:
Please call University of Dayton, Special Programs and Continuing Education at (937) 229-2347 or visit our website.
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